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SIERRA Thermal Mass Flow controllers

 

General Description

SIERRA Instruments offers a wide variety of thermal mass flow controllers. The low-Flow line covers flow rates from 0.05 - 1000 nl/min and offers products for high-Accuracy Applications as well as economical solutions for industrial meterruns.

Read more about the thermal mass flow metering principles in our technologies section.

Smart-Trak® Model 100 - High Accuracy Mass flow controller

SIERRA Thermal Mass Flow Meter Controller
Digital high performance, stainless steel with Dial-A-Gas® Technology & computer control. Flow ranges from 0 to 15 sccm to 0 to 1000 slpm.

  • Flow Rates: 0 -15 sccm to 0 - 1000 slpm.
  • Max. Pressure: 34 bar
  • Temp.: 0-50°C
  • Accuracy: +/- 0.5% of full scale
  • Materials: 316 stainless steel construction
  • Flow ranges: from 0 to 10 sccm to 0-1000 slpm
  • Fast-response control valve.
  • True digital performance with great flexibility
  • “Primary Standard” calibration NIST traceability
  • Dial-A-Gas® Technology
  • 10 pre-programmed gases come standard
  • Substitute up to 9 gases of your own
  • control functions also available from PC via RS-232
  • Traditional analog control also included
    • 4-20 mA
    • 0-5 Vdc
    • 0-10 Vdc
    • 1-5 Vdc
  • Source code for RS-232 communication provided
  • Profibus DP
  • Multi-drop RS-485/MODBUS RTU (Using Compod)
  • Small footprint makes drop-in replacement easy
  • Single-sided 24 Vdc power supply
  • CE approval


For more detailed information visit SIERRA's Product Description

Micro-Trak™ Model 101 Ultra Low Flow Mass Cantroller

SIERRA Thermal Mass Flow Meter Controller
Specifically designed for flow ranges under 4 sccm (smlm) with a minimum controllable mass flow rate of 0.1 sccm (smlm). Also get digital high performance, stainless steel construction with Dial-A-Gas® Technology & computer control.

  • Flow Rates: 0.1-4 scm³
  • Max. Pressure: 34 bar
  • Temp.: 0-50°C
  • Accuracy: of +/- 1.0% of full scale
  • Repeatability: of +/- 0.2% of full scale
  • Materials: 316 Stainless steel construction
  • Connections: VCO, VCR
  • Capillary Thermal Technology
  • Digital performance with maximum flexibility
  • Primary Standard calibration and NIST traceability
  • Dial-A-Gas Technology—10 preprogrammed gases or select your own
  • Pilot Module allows display and control of all neccessary controlfunctions
  • All functions also available via RS-232
  • Profibus DP
  • Multi-drop RS-485/MODBUS RTU (Using Compod)
  • Traditional analog controls and outputs also included:
    • 4-20 mA
    • 0-5 VDC
    • 1-5 VDC
    • 0-10 VDC
  • Small footprint makes installation easy
  • 24 VDC power supply
  • CE approval


For more detailed information visit SIERRA's Product Description

Max-Trak® Model 180 Industrial Mass Flow Controller

SIERRA Thermal Mass Flow Meter Controller
Industry’s only NEMA 6/IP67 truly industrial MFC; Available as heavy industrial flanged version; Accuracy of +/- 1% of Full Scale and flow ranges from 0 to 10 SLPM to 0 to 1000 SLPM
  • Industry's only NEMA 6/IP67 industrial MFC provides wash down protection eliminating secondary enclosures
  • Measure & control gas mass flow rates up to 1000 SLPM - Sierra offers other models up to 100,000 slpm & higher (meters only)
  • Accuracy: +/- 1% of Full Scale
  • Repeatability: +/- 0.2% Full Scale ensures a stable process even under changing conditions
  • Dial-A-Gas® lets you select from up to 10 gases in one instrument, creating great flexibility and reducing spares inventories
  • Operation at low differential pressures possible due to powerful valve design
  • Both digital and analog communication included
  • Multi-drop RS-485/MODBUS RTU
  • All stainless steel construction is suitable for any clean gas, even corrosives & toxics
  • Single sided power (24 VDC) reduces installation cost
  • View and change the following functions in the field via RS-232 or our unique Pilot Module:
    • Gas type
    • Setpoint value
    • Setpoint source
    • Engineering units
    • Output signal
    • Valve state (open, closed or automatic)
    • Full scale value
    • Zero Value
    • Span Value


For more detailed information visit SIERRA's Product Description

Max-Trak® Model 180 Industrial Mass Flow Controller

SIERRA Thermal Mass Flow Meter
Industry’s only NEMA 6/IP67 truly industrial MFC; Also available as heavy industrial flanged version; Accuracy of +/- 1% of Full Scale and flow ranges from 0 to 10 SLPM to 0 to 1000 SLPM
  • Flow-ranges: 0-1000 SLPM
  • Max. Pressure: 34 bar
  • Temp.: 0-50 °C
  • Accuracy: +/- 1% of Full Scale
  • Repeatability: +/- 0.2% Full Scale ensures a stable process even under changing conditions
  • Connections: VCO, VCR, Compression fitting, Flange
  • Industry's only NEMA 6/IP67 industrial MFC provides wash down protection eliminating secondary enclosures
  • Capillary Thermal Technology
  • Dial-A-Gas® lets you select from up to 10 gases in one instrument, creating great flexibility and reducing spares inventories
  • Operation at low differential pressures possible due to powerful valve design
  • Both digital and analog communication included
  • Multi-drop RS-485/MODBUS RTU
  • All stainless steel construction is suitable for any clean gas, even corrosives & toxics
  • Single sided power (24 VDC) reduces installation cost
  • View and change critical control functions in the field via RS-232 or our unique Pilot Module


For more detailed information visit SIERRA's Product Description

Digital Smart-Trak 50 Series Mass Flow Controller

SIERRA Thermal Mass Flow Meter
Economic mass flow controller for OM and other applications, using the technology of the series 100 where the features of this high-end series are not needed; Constructed from your choice of 316SS or aluminum; Accuracy of +/- 1.5% of full scale and flow ranges from 0-10 sccm to 0-200 slpm, RS-232, RS-485, small footprint, CE approved.
  • Flow Range: 0-10 sccm up to 200 slpm (nlpm) range, compact footprint
  • Max. Pressure: 10 bar
  • Temp.: 0-50°C
  • Accuracy: +/- 1.5% of Full Scale
  • Repeatability: +/- 0.25% of Full Scale
  • Connections: VCO, VCR, Compression fitting
  • Materials: 316L SS or Aluminum (Medium flow 0-200 slpm unit only in Aluminum) 
  • Response Time: Fast 300ms valve time constant 
  • Field Calibration: Field zero, span, adjust
  • Interface/Communications: Large local display or free user software; 4-20mA, 0-5 Vdc, RS-232, RS-485 (addressable)
  • Gas: All clean gases
  • Approvals: CE
  • Capillary Thermal Technology
  • Off the shelf delivery on seven common in-stock flow rates
  • Easy setup, field calibrate without sending units back to factory
  • Add communications, displays or future functionality as needed
  • Competitive pricing and volume discounting
  • Free engineering for basic customization


For more detailed information visit SIERRA's Product Description

Compod™ Programmable Control Module

SIERRA Thermal Mass Flow Meter Controller
With its advanced mass air flow sensor capabilities, the Compod™, coupled with Sierra’s Smart-Trak® 2 Model 100 mass flow meters (MFM’s) or controllers (MFC’s) greatly simplifies flow control systems and permits networking of multiple instruments using open-source MODBUS RTU protocol. Compod™ also monitors the functionality of the mass flow meter or controller and includes diagnostics, notifying users of valve faults or system upsets. By adding the Compod™ flow control module to a new or existing Smart-Trak® MFM or MFC, end users can take complete control. Two digital outputs and one analog input can be configured by the user for a wide variety of process controls including:
  • Gas mixing and blending
  • Batch control
  • Sensor driven leak testing
  • Process monitoring
  • Physical Vapor Deposition (Sputtering)
  • Pressure monitoring and control
  • Gas ratio control
  • Internal valve performance monitoring
  • Triggering alarms
  • Starting or stopping gas flows automatically under user-defined conditions
  • Gas flow totalization with adjustable pulse output
  • And many more...


For more detailed information visit SIERRA's Product Description